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Measuring porosity: a comparative study of techniques

dc.contributor.authorKastenmeier, Bernd E.
dc.contributor.authorGidley, David W.
dc.contributor.authorVu, Long
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorKnorr, Andreas
dc.contributor.authorForan, Brendan
dc.date.accessioned2021-10-15T14:06:59Z
dc.date.available2021-10-15T14:06:59Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9111
dc.sourceIIOimport
dc.titleMeasuring porosity: a comparative study of techniques
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage507
dc.source.endpage511
dc.source.conferenceAdvanced Metallization Conference 2003
dc.source.conferencedate21/10/2003
dc.source.conferencelocationMontreal/Tokyo
imec.availabilityPublished - open access
imec.internalnotesConference Proceedings AMC XIX


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