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Charge trapping in SiO2/HfO2 gate dielctrics: comparison between charge-pumping and pulsed I-D-V-G
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Authors
Kerber, A.
;
Cartier, E.
;
Pantisano, Luigi
;
Degraeve, Robin
;
Groeseneken, Guido
;
Maes, Herman
;
Schwalke, U.
Issue
1_4
Journal
Microelectronic Engineering
Volume
72
Title
Charge trapping in SiO2/HfO2 gate dielctrics: comparison between charge-pumping and pulsed I-D-V-G
Publication type
Journal article
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