dc.contributor.author | Tilmans, Harrie | |
dc.contributor.author | Baert, Kris | |
dc.contributor.author | Verbist, Agnes | |
dc.contributor.author | Puers, Bob | |
dc.date.accessioned | 2021-09-29T13:17:47Z | |
dc.date.available | 2021-09-29T13:17:47Z | |
dc.date.issued | 1995 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/911 | |
dc.source | IIOimport | |
dc.title | CMOS foundry-based micromachining | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Tilmans, Harrie | |
dc.contributor.imecauthor | Puers, Bob | |
dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 183 | |
dc.source.endpage | 187 | |
dc.source.conference | 6th Micromechanics Europe Workshop - MME | |
dc.source.conferencedate | 3/09/1995 | |
dc.source.conferencelocation | Copenhagen Denmark | |
imec.availability | Published - open access | |