dc.contributor.author | Kesters, Els | |
dc.contributor.author | Le, Quoc Toan | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.contributor.author | Boullart, Werner | |
dc.contributor.author | Mertens, Paul | |
dc.date.accessioned | 2021-10-15T14:09:12Z | |
dc.date.available | 2021-10-15T14:09:12Z | |
dc.date.issued | 2004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9121 | |
dc.source | IIOimport | |
dc.title | Effect of chemical solution on the stability of low-k films | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Kesters, Els | |
dc.contributor.imecauthor | Le, Quoc Toan | |
dc.contributor.imecauthor | Boullart, Werner | |
dc.contributor.imecauthor | Mertens, Paul | |
dc.contributor.orcidimec | Le, Quoc Toan::0000-0002-0206-6279 | |
dc.contributor.orcidimec | Boullart, Werner::0000-0001-7614-2097 | |
dc.source.peerreview | no | |
dc.source.conference | 7th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS | |
dc.source.conferencedate | 20/09/2004 | |
dc.source.conferencelocation | Brussels Belgium | |
imec.availability | Published - imec | |