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Piezoelectric actuation for application in RF-MEMS switches

dc.contributor.authorKlaasse, Gerard
dc.contributor.authorPuers, Bob
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-15T14:11:24Z
dc.date.available2021-10-15T14:11:24Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9131
dc.sourceIIOimport
dc.titlePiezoelectric actuation for application in RF-MEMS switches
dc.typeProceedings paper
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage174
dc.source.endpage180
dc.source.conferenceMEMS, MOEMS, and Micromachining
dc.source.conferencedate29/04/2004
dc.source.conferencelocationStrasbourg France
imec.availabilityPublished - open access
imec.internalnotesProceedings of the SPIE; Vol. 5455


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