Method for determining the effectiveness of silicon nitride as a barrier layer for HfO2

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Authors
Kraus, Harald; Snow, Jim; Van Doorne, Patrick; Fyen, Wim; Mertens, Paul; Kovacs, Frederic
Conference
Physics and Technology of High-k Gate Dielectrics II
Title
Method for determining the effectiveness of silicon nitride as a barrier layer for HfO2
Publication type
Proceedings paper
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