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Gray assist bar OPC

dc.contributor.authorLafferty, Neal
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorSmith, B.W.
dc.contributor.authorLassiter, Matthew
dc.contributor.authorMartin, Patrick M.
dc.date.accessioned2021-10-15T14:17:14Z
dc.date.available2021-10-15T14:17:14Z
dc.date.issued2004-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9156
dc.sourceIIOimport
dc.titleGray assist bar OPC
dc.typeProceedings paper
dc.contributor.imecauthorVandenberghe, Geert
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage381
dc.source.endpage392
dc.source.conferenceOptical Microlithography XVII
dc.source.conferencedate22/02/2004
dc.source.conferencelocationSanta Clara, CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings SPIE, vol. 5377


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