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Plasma modification of porous low-k dielectrics

dc.contributor.authorLe, Quoc Toan
dc.contributor.authorWhelan, Caroline
dc.contributor.authorStruyf, Herbert
dc.contributor.authorBender, Hugo
dc.contributor.authorConard, Thierry
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorBoullart, Werner
dc.contributor.authorVanhaelemeersch,
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T14:24:04Z
dc.date.available2021-10-15T14:24:04Z
dc.date.issued2004-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9186
dc.sourceIIOimport
dc.titlePlasma modification of porous low-k dielectrics
dc.typeJournal article
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.source.peerreviewno
dc.source.beginpageF49
dc.source.endpageF53
dc.source.journalElectrochemical and Solid-State Letters
dc.source.issue9
dc.source.volume7
imec.availabilityPublished - imec


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