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Polymer dielectric treatment using UV-ozone: a photoelectron spectroscopy and ellipsometric porosimetry study.

dc.contributor.authorLe, Quoc Toan
dc.contributor.authorWhelan, Caroline
dc.contributor.authorStruyf, Herbert
dc.contributor.authorVanhaelemeersch, Serge
dc.contributor.authorAzioune, A.
dc.contributor.authorLouette, P.
dc.contributor.authorPireaux, J-J
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T14:24:19Z
dc.date.available2021-10-15T14:24:19Z
dc.date.issued2004-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9187
dc.sourceIIOimport
dc.titlePolymer dielectric treatment using UV-ozone: a photoelectron spectroscopy and ellipsometric porosimetry study.
dc.typeJournal article
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorVanhaelemeersch, Serge
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecVanhaelemeersch, Serge::0000-0003-2102-7395
dc.source.peerreviewno
dc.source.beginpage3807
dc.source.endpage3810
dc.source.journalJournal of Applied Physics
dc.source.issue7
dc.source.volume96
imec.availabilityPublished - imec


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