Authors

Le, Quoc Toan; Whelan, Caroline; Struyf, Herbert; Vanhaelemeersch, Serge; Azioune, A.; Louette, P.; Pireaux, J-J; Maex, Karen

Issue

7

Journal

Journal of Applied Physics

Volume

96

Title

Polymer dielectric treatment using UV-ozone: a photoelectron spectroscopy and ellipsometric porosimetry study.

Publication type

Journal article