Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Polymer dielectric treatment using UV-ozone: a photoelectron spectroscopy and ellipsometric porosimetry study.
Publication:
Polymer dielectric treatment using UV-ozone: a photoelectron spectroscopy and ellipsometric porosimetry study.
Copy permalink
Date
2004
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Le, Quoc Toan
;
Whelan, Caroline
;
Struyf, Herbert
;
Vanhaelemeersch, Serge
;
Azioune, A.
;
Louette, P.
;
Pireaux, J-J
;
Maex, Karen
Journal
Journal of Applied Physics
Abstract
Description
Statistics
Views
1861
since deposited on 2021-10-15
Acq. date: 2026-08-03
Citations
Statistics
Views
1861
since deposited on 2021-10-15
Acq. date: 2026-08-03
Citations