Publication:
Polymer dielectric treatment using UV-ozone: a photoelectron spectroscopy and ellipsometric porosimetry study.
Date
| dc.contributor.author | Le, Quoc Toan | |
| dc.contributor.author | Whelan, Caroline | |
| dc.contributor.author | Struyf, Herbert | |
| dc.contributor.author | Vanhaelemeersch, Serge | |
| dc.contributor.author | Azioune, A. | |
| dc.contributor.author | Louette, P. | |
| dc.contributor.author | Pireaux, J-J | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Le, Quoc Toan | |
| dc.contributor.imecauthor | Struyf, Herbert | |
| dc.contributor.imecauthor | Vanhaelemeersch, Serge | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.orcidimec | Le, Quoc Toan::0000-0002-0206-6279 | |
| dc.contributor.orcidimec | Vanhaelemeersch, Serge::0000-0003-2102-7395 | |
| dc.date.accessioned | 2021-10-15T14:24:19Z | |
| dc.date.available | 2021-10-15T14:24:19Z | |
| dc.date.issued | 2004-10 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9187 | |
| dc.source.beginpage | 3807 | |
| dc.source.endpage | 3810 | |
| dc.source.issue | 7 | |
| dc.source.journal | Journal of Applied Physics | |
| dc.source.volume | 96 | |
| dc.title | Polymer dielectric treatment using UV-ozone: a photoelectron spectroscopy and ellipsometric porosimetry study. | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |