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Polymer dielectric treatment using UV-ozone: a photoelectron spectroscopy and ellipsometric porosimetry study.
Publication:
Polymer dielectric treatment using UV-ozone: a photoelectron spectroscopy and ellipsometric porosimetry study.
Date
2004-10
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Le, Quoc Toan
;
Whelan, Caroline
;
Struyf, Herbert
;
Vanhaelemeersch, Serge
;
Azioune, A.
;
Louette, P.
;
Pireaux, J-J
;
Maex, Karen
Journal
Journal of Applied Physics
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1860
since deposited on 2021-10-15
Acq. date: 2025-10-26
Citations
Metrics
Views
1860
since deposited on 2021-10-15
Acq. date: 2025-10-26
Citations