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Determining the impact of statistical fluctuations on resist line edge roughness

dc.contributor.authorLeunissen, Peter
dc.contributor.authorErcken, Monique
dc.contributor.authorPatsis, George P.
dc.date.accessioned2021-10-15T14:25:26Z
dc.date.available2021-10-15T14:25:26Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9192
dc.sourceIIOimport
dc.titleDetermining the impact of statistical fluctuations on resist line edge roughness
dc.typeOral presentation
dc.contributor.imecauthorErcken, Monique
dc.source.peerreviewno
dc.source.conferenceInternational Conference Micro- and Nanoengineering
dc.source.conferencedate19/09/2004
dc.source.conferencelocationRotterdam The Netherlands
imec.availabilityPublished - imec


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