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Thermo-mechanical stability of 3-D SrBi2Ta2O9 ferroelectric capacitors

dc.contributor.authorLisoni, Judit
dc.contributor.authorWafer, K.
dc.contributor.authorJohnson, J.A.
dc.contributor.authorVandevelde, Bart
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorGoux, Ludovic
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorMaes, David
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWouters, Dirk
dc.contributor.authorCaputa, Concetta
dc.contributor.authorZambrano, R.
dc.date.accessioned2021-10-15T14:31:04Z
dc.date.available2021-10-15T14:31:04Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9214
dc.sourceIIOimport
dc.titleThermo-mechanical stability of 3-D SrBi2Ta2O9 ferroelectric capacitors
dc.typeMeeting abstract
dc.contributor.imecauthorVandevelde, Bart
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.orcidimecVandevelde, Bart::0000-0002-6753-6438
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.source.peerreviewno
dc.source.beginpage1-10-P
dc.source.conferenceAbstracts 16th International Symposium on Integrated Ferroelectrics
dc.source.conferencedate5/04/2004
dc.source.conferencelocationGyeongju Korea
imec.availabilityPublished - imec


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