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Interface passivation mechanisms in metal gated oxide capacitors

dc.contributor.authorLujan, Guilherme
dc.contributor.authorSchram, Tom
dc.contributor.authorSjoblom, G.
dc.contributor.authorWitters, Thomas
dc.contributor.authorKubicek, Stefan
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.contributor.authorDe Meyer, Kristin
dc.date.accessioned2021-10-15T14:34:33Z
dc.date.available2021-10-15T14:34:33Z
dc.date.issued2004-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9228
dc.sourceIIOimport
dc.titleInterface passivation mechanisms in metal gated oxide capacitors
dc.typeProceedings paper
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorWitters, Thomas
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.beginpage325
dc.source.endpage328
dc.source.conferenceProceedings of the 34th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate20/09/2004
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec


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