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In-situ TEM on He implantation induced defects in SiGe/Si
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In-situ TEM on He implantation induced defects in SiGe/Si
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Date
2004
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Luysberg, Martina
;
Hueging, N.
;
Urban, K.
;
Buca, D.
;
Holländer, B.
;
Mantl, S.
;
Morschbacher, M.
;
Fichtner, P.F.P.
;
Loo, Roger
;
Caymax, Matty
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1919
since deposited on 2021-10-15
1
last month
Acq. date: 2025-12-09
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Metrics
Views
1919
since deposited on 2021-10-15
1
last month
Acq. date: 2025-12-09
Citations