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The role of internal dislocation sources for the strain ralaxation of pseudomorphic SiGe/Si structures
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Authors
Luysberg, Martina
;
Hueging, Norbert
;
Lenk, Steffi
;
Buca, Dan
;
Hollaender, Bernd
;
Mantl, Siegfried
;
Marcio, J
;
Fichtner, Paulo
;
Loo, Roger
;
Caymax, Matty
Conference
MRS Spring Meeting Symposium B: High-Mobility Group-IV Materials and Devices
Title
The role of internal dislocation sources for the strain ralaxation of pseudomorphic SiGe/Si structures
Publication type
Oral presentation
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