Integration of MOCVD SBT stacked ferroelectric capacitors in a 0.35 μm CMOS technology

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Authors

Maes, David; Everaert, Jean-Luc; Goux, Ludovic; Lisoni, Judit; Paraschiv, Vasile; Schwitters, M.; Haspeslagh, Luc; Wouters, Dirk; Artoni, C.; Caputa, Concetta; Casella, P.; Corallo, G.; Russo, G.; Zambrano, R.; Monchoix, H.; Van Autryve, Luc

Journal

Integrated Ferroelectrics

Volume

66

Title

Integration of MOCVD SBT stacked ferroelectric capacitors in a 0.35 μm CMOS technology

Publication type

Journal article

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