Publication:

Integration of MOCVD SBT stacked ferroelectric capacitors in a 0.35 μm CMOS technology

Date

2004
Journal article
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Author(s)

Maes, David
;
Everaert, Jean-Luc
;
Goux, Ludovic  
;
Lisoni, Judit
;
Paraschiv, Vasile  
;
Schwitters, M.
;
Haspeslagh, Luc  
;
Wouters, Dirk
;
Artoni, C.
;
Caputa, Concetta
;
Casella, P.
;
Corallo, G.
;
Russo, G.
;
Zambrano, R.
;
Monchoix, H.
;
Van Autryve, Luc  

Journal

Integrated Ferroelectrics

Abstract

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