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Integration of MOCVD SBT stacked ferroelectric capacitors in a 0.35 μm CMOS technology

dc.contributor.authorMaes, David
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorGoux, Ludovic
dc.contributor.authorLisoni, Judit
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorSchwitters, M.
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWouters, Dirk
dc.contributor.authorArtoni, C.
dc.contributor.authorCaputa, Concetta
dc.contributor.authorCasella, P.
dc.contributor.authorCorallo, G.
dc.contributor.authorRusso, G.
dc.contributor.authorZambrano, R.
dc.contributor.authorMonchoix, H.
dc.contributor.authorVan Autryve, Luc
dc.date.accessioned2021-10-15T14:39:30Z
dc.date.available2021-10-15T14:39:30Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9248
dc.sourceIIOimport
dc.titleIntegration of MOCVD SBT stacked ferroelectric capacitors in a 0.35 μm CMOS technology
dc.typeJournal article
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorVan Autryve, Luc
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.contributor.orcidimecEveraert, Jean-Luc::0000-0002-0660-9090
dc.contributor.orcidimecHaspeslagh, Luc::0000-0003-3561-3387
dc.source.peerreviewno
dc.source.beginpage71
dc.source.endpage83
dc.source.journalIntegrated Ferroelectrics
dc.source.volume66
imec.availabilityPublished - imec


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