ALCVD hafnium silicates for low power gate stacks

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Authors
Maes, Jan; Laitinen, O.; De Witte, Hilde; Deweerd, Wim; Delabie, Annelies; Conard, Thierry; Brijs, Bert; Wang, C. - G.; Velasco, H.; Wilk, G.
Conference
Atomic Layer Deposition Conference
Title
ALCVD hafnium silicates for low power gate stacks
Publication type
Oral presentation
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