Authors

Meynen, Herman; Vanden Bulcke, Mathieu; Gonzalez, Mario; Harkness, Brian; Gardner, Geoff; Sudbury-Holtschlag, Joan; Vandevelde, Bart; Winters, Christophe; Beyne, Eric

Issue

1_4

Journal

Microelectronic Engineering

Volume

76

Title

Ultra low stress and low temperature patternable silicone materials for applications within microelectronics

Publication type

Journal article