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A systematic study of trade-offs in engineering a locally strained pMOSFET

dc.contributor.authorNouri, Faran
dc.contributor.authorVerheyen, Peter
dc.contributor.authorWashington, Lori
dc.contributor.authorMoroz, Victor
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorKawaguchi, S.
dc.contributor.authorBiesemans, Serge
dc.contributor.authorSchreutelkamp, Rob
dc.contributor.authorKim, Y.
dc.contributor.authorShen, M.
dc.contributor.authorXu, X.
dc.contributor.authorRooyackers, Rita
dc.contributor.authorJurczak, Gosia
dc.contributor.authorEneman, Geert
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorSmith, L.
dc.contributor.authorPramanik, D.
dc.contributor.authorForstner, H.
dc.contributor.authorThirupapuliyur, S.
dc.contributor.authorHigashi, G.
dc.date.accessioned2021-10-15T15:06:42Z
dc.date.available2021-10-15T15:06:42Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9351
dc.sourceIIOimport
dc.titleA systematic study of trade-offs in engineering a locally strained pMOSFET
dc.typeProceedings paper
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.source.peerreviewno
dc.source.beginpage1055
dc.source.endpage1058
dc.source.conferenceTechnical Digest International Electron Devices Meeting - IEDM
dc.source.conferencedate13/12/2004
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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