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E-learning for microelectronics manufacturing

dc.contributor.authorOechsner, Richard
dc.contributor.authorPfeffer, Marcus
dc.contributor.authorPfitzner, Lothar
dc.contributor.authorRyssel, Heiner
dc.contributor.authorBeer, Kai
dc.contributor.authorBoldin, Matthias
dc.contributor.authorDe Mey, Bart
dc.contributor.authorEngelhard, Manfred
dc.contributor.authorO'Murchu, Cian
dc.contributor.authorWesterwick, Axel
dc.contributor.authorColson, Paul
dc.contributor.authorMadore, Michael
dc.contributor.authorKrahn, Ludger
dc.contributor.authorKempe, Winfried
dc.contributor.authorLuisman, Ed
dc.date.accessioned2021-10-15T15:08:03Z
dc.date.available2021-10-15T15:08:03Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9356
dc.sourceIIOimport
dc.titleE-learning for microelectronics manufacturing
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.conferenceInternational Symposium on Semiconductor Manufacturing
dc.source.conferencedate27/09/2004
dc.source.conferencelocationTokyo Japan
imec.availabilityPublished - imec


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