Authors

Okoroanyanwu, Uzo; Stepanenko, Nickolay; Vereecke, Guy; Eliat, Astrid; Kocsis, Michael; Kang, Young-Seog; Jonckheere, Rik; Conard, Thierry; Ronse, Kurt

Conference

Optical Microlithography XVII

Title

Experimental investigation of fabrication process-, transportation-, storage, and handling-induced contamination of 157-nm reticles and vacuum-UV cleaning

Publication type

Proceedings paper