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Surface cleaning and preparation related aspects of the germanium surface chemistry

dc.contributor.authorOnsia, Bart
dc.contributor.authorCaymax, Matty
dc.contributor.authorConard, Thierry
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorDelabie, Annelies
dc.contributor.authorHeyns, Marc
dc.contributor.authorMertens, Paul
dc.contributor.authorMeuris, Marc
dc.contributor.authorSioncke, Sonja
dc.contributor.authorTheuwis, A.
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorVan Steenbergen, Jan
dc.contributor.authorVinckier, Chris
dc.date.accessioned2021-10-15T15:11:06Z
dc.date.available2021-10-15T15:11:06Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9367
dc.sourceIIOimport
dc.titleSurface cleaning and preparation related aspects of the germanium surface chemistry
dc.typeOral presentation
dc.contributor.imecauthorOnsia, Bart
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorVan Steenbergen, Jan
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewno
dc.source.conferenceSemiconductor Interface Secialists' Conference
dc.source.conferencedate9/12/2004
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - imec


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