A reliable and compact polymer-based package for capacitive RF-MEMS switches

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Authors
Oya, Y.; Okubora, A.; van Spengen, Merlijn; Soussan, Philippe; Stoukatch, Serguei; Rottenberg, Xavier; Ratchev, Petar; Tilmans, Harrie; De Raedt, Walter; Beyne, Eric; De Moor, Piet; De Wolf, Ingrid; Baert, Kris
Conference
Technical Digest International Electron Device Meeting - IEDM
Title
A reliable and compact polymer-based package for capacitive RF-MEMS switches
Publication type
Proceedings paper
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