Authors

Pagès, Xavier; Van der Jeugd, Kees; Kuznetsov, Vladimir; Granneman, Ernst; Lauwers, Anne; Lindsay, Richard

Conference

Advanced Short-Time Thermal Processing for Si-Based CMOS Devices II

Title

The effect of ramp rate - short process time and partial reactions on Cobalt and Nickel silicide formation

Publication type

Proceedings paper

Embargo date

9999-12-31