Show simple item record

A surface micromachined tunable film bulk acoustic resonator

dc.contributor.authorPan, Wanling
dc.contributor.authorSoussan, Philippe
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-15T15:16:18Z
dc.date.available2021-10-15T15:16:18Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9386
dc.sourceIIOimport
dc.titleA surface micromachined tunable film bulk acoustic resonator
dc.typeProceedings paper
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage166
dc.source.endpage173
dc.source.conferenceMEMS, MOEMS, and Micromachining
dc.source.conferencedate29/04/2004
dc.source.conferencelocationStrasbourg France
imec.availabilityPublished - open access
imec.internalnotesProceedings of the SPIE; Vol. 5455


Files in this item

Thumbnail
Name:
10396.pdf
Size:
362.0Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record