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A surface micromachined tunable film bulk acoustic resonator

dc.contributor.authorPan, Wanling
dc.contributor.authorSoussan, Philippe
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-15T15:16:33Z
dc.date.available2021-10-15T15:16:33Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9387
dc.sourceIIOimport
dc.titleA surface micromachined tunable film bulk acoustic resonator
dc.typeProceedings paper
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage99
dc.source.endpage100
dc.source.conferenceTechnical Digest of Eurosensors XVIII
dc.source.conferencedate12/09/2004
dc.source.conferencelocationRome Italy
imec.availabilityPublished - imec


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