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On the data interpretation of the C-AFM measurements in the characterization of thin insulating layers

dc.contributor.authorPetry, Jasmine
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorPantisano, Luigi
dc.contributor.authorDegraeve, Robin
dc.date.accessioned2021-10-15T15:25:49Z
dc.date.available2021-10-15T15:25:49Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9422
dc.sourceIIOimport
dc.titleOn the data interpretation of the C-AFM measurements in the characterization of thin insulating layers
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorDegraeve, Robin
dc.source.peerreviewno
dc.source.conference13th Workshop on DIelectrics in Microelectronics - Wodim
dc.source.conferencedate28/06/2004
dc.source.conferencelocationKinsale Ireland
imec.availabilityPublished - imec


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