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Reliability and failure analysis of microsystems

dc.contributor.authorPieters, Philip
dc.contributor.authorBorzi, Raffaella
dc.contributor.authorvan Spengen, Merlijn
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-15T15:27:51Z
dc.date.available2021-10-15T15:27:51Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9430
dc.sourceIIOimport
dc.titleReliability and failure analysis of microsystems
dc.typeProceedings paper
dc.contributor.imecauthorPieters, Philip
dc.contributor.imecauthorBorzi, Raffaella
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage297
dc.source.endpage301
dc.source.conferenceProceedings of the 9th International Conference on the Commercialization of Micro and Nano Systems - COMS
dc.source.conferencedate29/08/2004
dc.source.conferencelocationEdmonton Canada
imec.availabilityPublished - imec
imec.internalnotes


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