Show simple item record

Poly-SiGe as novel MEMS-CMOS integration technology

dc.contributor.authorPieters, Philip
dc.contributor.authorBorzi, Raffaella
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-15T15:28:06Z
dc.date.available2021-10-15T15:28:06Z
dc.date.issued2004-04
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9431
dc.sourceIIOimport
dc.titlePoly-SiGe as novel MEMS-CMOS integration technology
dc.typeProceedings paper
dc.contributor.imecauthorPieters, Philip
dc.contributor.imecauthorBorzi, Raffaella
dc.source.peerreviewno
dc.source.conferenceSemicon Europe 2004, International MEMS/MST Industry Forum
dc.source.conferencedate19/04/2004
dc.source.conferencelocation
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record