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Business opportunities for poly-SiGe as post-CMOS MEMS integration technology

dc.contributor.authorPieters, Philip
dc.contributor.authorBorzi, Raffaella
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-15T15:28:21Z
dc.date.available2021-10-15T15:28:21Z
dc.date.issued2004-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9432
dc.sourceIIOimport
dc.titleBusiness opportunities for poly-SiGe as post-CMOS MEMS integration technology
dc.typeProceedings paper
dc.contributor.imecauthorPieters, Philip
dc.contributor.imecauthorBorzi, Raffaella
dc.source.peerreviewno
dc.source.beginpage157
dc.source.endpage163
dc.source.conferenceProceedings of the 9th International Conference on the Commercialization of Micro and Nano Systems - COMS
dc.source.conferencedate29/08/2004
dc.source.conferencelocationEdmonton Canada
imec.availabilityPublished - imec


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