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Multi-layer thin-film MCM-D on high-resistivity silicon

dc.contributor.authorPosada Quijana, Guillermo
dc.contributor.authorCarchon, Geert
dc.contributor.authorDupuis, Olivier
dc.contributor.authorDe Raedt, Walter
dc.date.accessioned2021-10-15T15:35:13Z
dc.date.available2021-10-15T15:35:13Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9458
dc.sourceIIOimport
dc.titleMulti-layer thin-film MCM-D on high-resistivity silicon
dc.typeProceedings paper
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.source.peerreviewno
dc.source.beginpage14
dc.source.endpage150
dc.source.conferenceMicrowave Technology and Techniques Workshop
dc.source.conferencedate11/05/2004
dc.source.conferencelocationNoordwijk The Netherlands
imec.availabilityPublished - imec


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