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Mechanisme for the formation of metal oxide particles in ALD during the chemisorption of metal chlorides

dc.contributor.authorPuurunen, Riikka
dc.date.accessioned2021-10-15T15:39:10Z
dc.date.available2021-10-15T15:39:10Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9473
dc.sourceIIOimport
dc.titleMechanisme for the formation of metal oxide particles in ALD during the chemisorption of metal chlorides
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceAtomic Layer Deposition Conference
dc.source.conferencedate16/08/2004
dc.source.conferencelocationHelsinki Finland
imec.availabilityPublished - imec


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