Show simple item record

Island growth in atomic layer deposition: a phenomenological model

dc.contributor.authorPuurunen, Riikka
dc.contributor.authorDelabie, Annelies
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-15T15:39:39Z
dc.date.available2021-10-15T15:39:39Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9475
dc.sourceIIOimport
dc.titleIsland growth in atomic layer deposition: a phenomenological model
dc.typeProceedings paper
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceAtomic Layer Deposition Conference
dc.source.conferencedate16/08/2004
dc.source.conferencelocationHelsinki Finland
imec.availabilityPublished - imec
imec.internalnotescd-rom proceedings


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record