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Island growth as a growth mode in atomic layer deposition: a phenomenological model

dc.contributor.authorPuurunen, Riikka
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-15T15:39:54Z
dc.date.available2021-10-15T15:39:54Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9476
dc.sourceIIOimport
dc.titleIsland growth as a growth mode in atomic layer deposition: a phenomenological model
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage7686
dc.source.endpage7695
dc.source.journalJournal of Applied Physics
dc.source.issue12
dc.source.volume96
imec.availabilityPublished - imec


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