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Island growth as a growth mode in atomic layer deposition: a phenomenological model
Publication:
Island growth as a growth mode in atomic layer deposition: a phenomenological model
Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Puurunen, Riikka
;
Vandervorst, Wilfried
Journal
Journal of Applied Physics
Abstract
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2039
since deposited on 2021-10-15
Acq. date: 2025-10-24
Citations
Metrics
Views
2039
since deposited on 2021-10-15
Acq. date: 2025-10-24
Citations