Publication:
Island growth as a growth mode in atomic layer deposition: a phenomenological model
Date
| dc.contributor.author | Puurunen, Riikka | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-15T15:39:54Z | |
| dc.date.available | 2021-10-15T15:39:54Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9476 | |
| dc.source.beginpage | 7686 | |
| dc.source.endpage | 7695 | |
| dc.source.issue | 12 | |
| dc.source.journal | Journal of Applied Physics | |
| dc.source.volume | 96 | |
| dc.title | Island growth as a growth mode in atomic layer deposition: a phenomenological model | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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