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Articles
Island growth as a growth mode in atomic layer deposition: a phenomenological model
Publication:
Island growth as a growth mode in atomic layer deposition: a phenomenological model
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Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Puurunen, Riikka
;
Vandervorst, Wilfried
Journal
Journal of Applied Physics
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2043
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Acq. date: 2026-01-06
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Views
2043
since deposited on 2021-10-15
1
last month
1
last week
Acq. date: 2026-01-06
Citations