Show simple item record

Island growth in the atomic layer deposition of zirconium oxide and aluminium oxide on hydrogen-terminated silicon: growth mode modelling and transmission electron microscopy

dc.contributor.authorPuurunen, Riikka
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBesling, Wim F. A.
dc.contributor.authorRichard, Olivier
dc.contributor.authorBender, Hugo
dc.contributor.authorConard, Thierry
dc.contributor.authorZhao, Chao
dc.contributor.authorDelabie, Annelies
dc.contributor.authorCaymax, Matty
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.contributor.authorViitanen, M.M.
dc.contributor.authorDe Ridder, M.
dc.contributor.authorBrongersma, Hidde
dc.contributor.authorTamminga, Y.
dc.contributor.authorDao, T.
dc.contributor.authorde Win, T.
dc.contributor.authorVerheijen, M.
dc.contributor.authorKaiser, M.
dc.contributor.authorTuominen, M.
dc.date.accessioned2021-10-15T15:40:18Z
dc.date.available2021-10-15T15:40:18Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9477
dc.sourceIIOimport
dc.titleIsland growth in the atomic layer deposition of zirconium oxide and aluminium oxide on hydrogen-terminated silicon: growth mode modelling and transmission electron microscopy
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.beginpage4878
dc.source.endpage4889
dc.source.journalJournal of Applied Physics
dc.source.issue9
dc.source.volume96
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record