dc.contributor.author | Richard, Olivier | |
dc.contributor.author | Bender, Hugo | |
dc.contributor.author | Puurunen, Riikka | |
dc.contributor.author | Kaushik, Vidya | |
dc.date.accessioned | 2021-10-15T15:49:16Z | |
dc.date.available | 2021-10-15T15:49:16Z | |
dc.date.issued | 2004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9508 | |
dc.source | IIOimport | |
dc.title | Silicon layer used as a holes detector in thin HfO2 films deposited by atomic layer deposition | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Richard, Olivier | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 407 | |
dc.source.endpage | 408 | |
dc.source.conference | Proceedings of the 13th European Microscopy Congress. Volume 2: Materials Sciences | |
dc.source.conferencedate | 22/08/2004 | |
dc.source.conferencelocation | Antwerpen Belgium | |
imec.availability | Published - open access | |