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MEMS tunable capacitors and switches for RF applications

dc.contributor.authorRijks, T.G.S.M.
dc.contributor.authorvan Beek, J.T.M.
dc.contributor.authorSteeneken, P.G.
dc.contributor.authorUlenaers, M.J.E.
dc.contributor.authorvan Eerd, P.
dc.contributor.authorden Toonder, J.M.J.
dc.contributor.authorvan Dijken, Q.R.
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorPuers, Bob
dc.contributor.authorWeekamp, J.W.
dc.contributor.authorScheer, J.M.
dc.contributor.authorJourdain, Anne
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-15T15:50:10Z
dc.date.available2021-10-15T15:50:10Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9511
dc.sourceIIOimport
dc.titleMEMS tunable capacitors and switches for RF applications
dc.typeProceedings paper
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage49
dc.source.endpage56
dc.source.conferenceProceedings 24th International Conference on Microelectronics - MIEL
dc.source.conferencedate16/04/2004
dc.source.conferencelocationNis Serbia
imec.availabilityPublished - imec


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