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Heterogeneous integration of III-V material and silicon: fabrication and devices

dc.contributor.authorRoelkens, Gunther
dc.contributor.authorBrouckaert, Joost
dc.contributor.authorChristiaens, Ilse
dc.contributor.authorDe Mesel, Kurt
dc.contributor.authorDumon, Pieter
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-15T15:51:33Z
dc.date.available2021-10-15T15:51:33Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9516
dc.sourceIIOimport
dc.titleHeterogeneous integration of III-V material and silicon: fabrication and devices
dc.typeProceedings paper
dc.contributor.imecauthorRoelkens, Gunther
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecRoelkens, Gunther::0000-0002-4667-5092
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.source.peerreviewno
dc.source.beginpage83
dc.source.endpage86
dc.source.conferenceProceedings Symposium IEEE/LEOS Benelux Chapter
dc.source.conferencedate2/12/2004
dc.source.conferencelocationGent Belgium
imec.availabilityPublished - imec


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