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Modelling of the RF self-actuation of electrostatic RF-MEMS devices

dc.contributor.authorRottenberg, Xavier
dc.contributor.authorBrebels, Steven
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorMertens, Robert
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-15T15:55:45Z
dc.date.available2021-10-15T15:55:45Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9531
dc.sourceIIOimport
dc.titleModelling of the RF self-actuation of electrostatic RF-MEMS devices
dc.typeProceedings paper
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorBrebels, Steven
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorMertens, Robert
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecBrebels, Steven::0000-0002-1568-0286
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage245
dc.source.endpage248
dc.source.conference17th IEEE International Conference on Micro Electro Mechanical Systems - MEMS
dc.source.conferencedate25/01/2004
dc.source.conferencelocationMaastricht The Netherlands
imec.availabilityPublished - imec


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