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Novel 2D+ model for the impact of the dielectric charge distribution on the electrostatic actuation of RF MEMS devices

dc.contributor.authorRottenberg, Xavier
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-15T15:56:37Z
dc.date.available2021-10-15T15:56:37Z
dc.date.issued2004-07
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9534
dc.sourceIIOimport
dc.titleNovel 2D+ model for the impact of the dielectric charge distribution on the electrostatic actuation of RF MEMS devices
dc.typeProceedings paper
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpageB11
dc.source.endpageB14
dc.source.conference5th Workshop on MEMS for MillimeterWAVE Communications - MEMSWAVE
dc.source.conferencedate30/06/2004
dc.source.conferencelocationUppsala Sweden
imec.availabilityPublished - imec


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