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Distributed dielectric charging and its impact on RF MEMS devices

dc.contributor.authorRottenberg, Xavier
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-15T15:57:11Z
dc.date.available2021-10-15T15:57:11Z
dc.date.issued2004-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9536
dc.sourceIIOimport
dc.titleDistributed dielectric charging and its impact on RF MEMS devices
dc.typeProceedings paper
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage77
dc.source.endpage80
dc.source.conferenceProceedings 34th European Microwave Conference
dc.source.conferencedate11/10/2004
dc.source.conferencelocationAmsterdam The Netherlands
imec.availabilityPublished - imec


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