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ARIBA: a combined analysis set-up for high resolution RBS and TOF-ERDA for thin film analysis

dc.contributor.authorSajavaara, Timo
dc.contributor.authorBrijs, Bert
dc.contributor.authorGiangrandi, Simone
dc.contributor.authorArstila, Kai
dc.contributor.authorVantomme, Andre
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-15T15:58:50Z
dc.date.available2021-10-15T15:58:50Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9542
dc.sourceIIOimport
dc.titleARIBA: a combined analysis set-up for high resolution RBS and TOF-ERDA for thin film analysis
dc.typeOral presentation
dc.contributor.imecauthorVantomme, Andre
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conference8th European Conference on Accelerators in Applied Research and Technology
dc.source.conferencedate20/09/2004
dc.source.conferencelocationParis France
imec.availabilityPublished - imec


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