Replication of submicron structures by nano-imprint lithography
dc.contributor.author | Scheerlinck, Stijn | |
dc.date.accessioned | 2021-10-15T16:02:52Z | |
dc.date.available | 2021-10-15T16:02:52Z | |
dc.date.issued | 2004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9556 | |
dc.source | IIOimport | |
dc.title | Replication of submicron structures by nano-imprint lithography | |
dc.type | Proceedings paper | |
dc.source.peerreview | no | |
dc.source.conference | 5th FTW PHD Symposium | |
dc.source.conferencedate | 1/12/2004 | |
dc.source.conferencelocation | Gent Belgium | |
imec.availability | Published - imec | |
imec.internalnotes | Proceedings available on CD-rom, paper 17 |
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