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Replication of SOI photonic structures by nano-imprint lithography

dc.contributor.authorScheerlinck, Stijn
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-15T16:03:08Z
dc.date.available2021-10-15T16:03:08Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9557
dc.sourceIIOimport
dc.titleReplication of SOI photonic structures by nano-imprint lithography
dc.typeProceedings paper
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.source.peerreviewno
dc.source.beginpage16
dc.source.conferenceIEEE/LEOS Benelux Chapter, Workshop on Photonics Materials and Technology
dc.source.conferencedate10/05/2004
dc.source.conferencelocationEindhoven The Netherlands
imec.availabilityPublished - imec


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